Paper Title:
Short-Range Order and Structure of Silicon Dioxide and Silicon Nitride Layers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 185-188)
Edited by
K.E. Heusler
Pages
285-292
DOI
10.4028/www.scientific.net/MSF.185-188.285
Citation
E.A. Repnikova, V.A. Gurtov, "Short-Range Order and Structure of Silicon Dioxide and Silicon Nitride Layers", Materials Science Forum, Vols. 185-188, pp. 285-292, 1995
Online since
March 1995
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.