Short-Range Order and Structure of Silicon Dioxide and Silicon Nitride Layers |
|
| Journal | Materials Science Forum (Volumes 185 - 188) |
|---|---|
| Volume | Passivation of Metals and Semiconductors |
| Edited by | K.E. Heusler |
| Pages | 285-292 |
| DOI | 10.4028/www.scientific.net/MSF.185-188.285 |
| Citation | E.A. Repnikova et al., 1995, Materials Science Forum, 185-188, 285 |
| Authors | E.A. Repnikova, V.A. Gurtov |
| Keywords | Amorphous Layer, Porosity, Short Range Order (SRO), X-Raying |
| Full Paper | 
Get the full paper by clicking here
|
First page example
