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A comparison of the Oxidation and Passivation of Si, Ge and InP

Journal Materials Science Forum (Volumes 185 - 188)
Volume Passivation of Metals and Semiconductors
Edited by K.E. Heusler
Pages 37-42
DOI 10.4028/www.scientific.net/MSF.185-188.37
Citation E.A. Irene, 1995, Materials Science Forum, 185-188, 37
Authors E.A. Irene
Keywords Film, Passivation, Semiconductor
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