Composition, Structure and Modification of Passivating Films on Semiconductors Deposited at Low Temperatures |
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| Journal | Materials Science Forum (Volumes 185 - 188) |
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| Volume | Passivation of Metals and Semiconductors |
| Edited by | K.E. Heusler |
| Pages | 65-72 |
| DOI | 10.4028/www.scientific.net/MSF.185-188.65 |
| Citation | Mikhail R. Baklanov et al., 1995, Materials Science Forum, 185-188, 65 |
| Authors | Mikhail R. Baklanov, L.L. Vasilyeva |
| Keywords | Deposition, Dielectric Film, Porosimetry, Reaction |
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