Paper Title:
Composition, Structure and Modification of Passivating Films on Semiconductors Deposited at Low Temperatures
  Abstract

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Periodical
Materials Science Forum (Volumes 185-188)
Edited by
K.E. Heusler
Pages
65-72
DOI
10.4028/www.scientific.net/MSF.185-188.65
Citation
M. R. Baklanov, L.L. Vasilyeva, "Composition, Structure and Modification of Passivating Films on Semiconductors Deposited at Low Temperatures", Materials Science Forum, Vols. 185-188, pp. 65-72, 1995
Online since
March 1995
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$32.00
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