Characterisation of the Mechanical Properties of Thin Film Cantilevers with the Atomic Force Microscope |
| Journal |
Materials Science Forum (Volumes 189 - 190) |
| Volume |
Interfaces II |
| Edited by |
B.C. Muddle |
| Pages |
107-114 |
| DOI |
10.4028/www.scientific.net/MSF.189-190.107 |
| Citation |
C.J. Drummond et al., 1995, Materials Science Forum, 189-190, 107 |
| Authors |
C.J. Drummond, T.J. Senden |
| Keywords |
Atomic Force Microscope (AFM), Density, Low Pressure Chemical Vapour Deposition, Mechanical Properties, Spring Constant, Thin Film, Young's Modulus |
| Full Paper |
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