Paper Title:
TDS and RB Studies of Ar Implanted to Si
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1375-1380
DOI
10.4028/www.scientific.net/MSF.196-201.1375
Citation
R. Hanada, S. Saito, S. Nagata, S. Yamaguchi, "TDS and RB Studies of Ar Implanted to Si", Materials Science Forum, Vols. 196-201, pp. 1375-1380, 1995
Online since
November 1995
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.