Paper Title:
Electron Energy Dependennce of Impurity Concentrations in Semiconductors by Electron Beam Doping (Superdiffusion)
  Abstract

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Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1619-1624
DOI
10.4028/www.scientific.net/MSF.196-201.1619
Citation
T. Wada, K. Yasuda, H. Fujimoto, H. Masuda, "Electron Energy Dependennce of Impurity Concentrations in Semiconductors by Electron Beam Doping (Superdiffusion)", Materials Science Forum, Vols. 196-201, pp. 1619-1624, 1995
Online since
November 1995
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