Paper Title:
Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1683-1690
DOI
10.4028/www.scientific.net/MSF.196-201.1683
Citation
I. Fusegawa, K. Takano, K. Kimura, N. Fujimaki, "Review of the Influence of Micro Crystal Defects in Silicon Single Crystals on Gate Oxide Integrity", Materials Science Forum, Vols. 196-201, pp. 1683-1690, 1995
Online since
November 1995
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Price
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