Paper Title:
Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1697-1706
DOI
10.4028/www.scientific.net/MSF.196-201.1697
Citation
J.G. Park, J.K. Jung, K.C. Cho, G. A. Rozgonyi, "Nature of D-Defect in CZ Silicon: D-Defect Dissolution and D-Defect Related T.D.D.B", Materials Science Forum, Vols. 196-201, pp. 1697-1706, 1995
Online since
November 1995
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Price
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