Paper Title:
Relationship between Grown-In Defects and Thermal History during CZ Si Crystal Growth
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1707-1712
DOI
10.4028/www.scientific.net/MSF.196-201.1707
Citation
K. Takano, K. Kitagawa, E. Lino, M. Kimura, H. Yamagishi, "Relationship between Grown-In Defects and Thermal History during CZ Si Crystal Growth", Materials Science Forum, Vols. 196-201, pp. 1707-1712, 1995
Online since
November 1995
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Price
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