Paper Title:
Growth Parameters Determining the Type of Grown-In Defects in Czockralski Silicon Crystals
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1713-1718
DOI
10.4028/www.scientific.net/MSF.196-201.1713
Citation
M. Hourai, E. Kajita, T. Nagashima, H. Fujiwara, S. Umeno, S. Sadamitsu, S. Miki, T. Shigematsu, "Growth Parameters Determining the Type of Grown-In Defects in Czockralski Silicon Crystals", Materials Science Forum, Vols. 196-201, pp. 1713-1718, 1995
Online since
November 1995
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Price
$32.00
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