Paper Title:
Genration of Oxidation Induced Stacking Faults in CZ Silicon Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1737-1742
DOI
10.4028/www.scientific.net/MSF.196-201.1737
Citation
K. Sueoka, M. Akatsuka, K. Nishihara, T. Yamamoto, S. Kobayashi, "Genration of Oxidation Induced Stacking Faults in CZ Silicon Wafers", Materials Science Forum, Vols. 196-201, pp. 1737-1742, 1995
Online since
November 1995
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Price
$35.00
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