Paper Title:
Relation between Minute Lattice Strain and Anomalous Oxygen Precipitation in a Czochralski-Grown Silicon Crystal
  Abstract

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Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1743-1748
DOI
10.4028/www.scientific.net/MSF.196-201.1743
Citation
S. Kimura, T. Ikarashi, A. Tanikawa, T. Ishikawa, "Relation between Minute Lattice Strain and Anomalous Oxygen Precipitation in a Czochralski-Grown Silicon Crystal", Materials Science Forum, Vols. 196-201, pp. 1743-1748, 1995
Online since
November 1995
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