Paper Title:
Lattice Defects in High Quality As-Grown CZ Silicon, Studied with Ligth Scattering and Preferential Etching Techniques
  Abstract

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Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1755-1760
DOI
10.4028/www.scientific.net/MSF.196-201.1755
Citation
J. Vanhellemont, G. Kissinger, D. Gräf, K. Kenis, M. Depas, P. W. Mertens, U. Lambert, M. M. Heyns, C. Claeys, H. Richter, P. Wagner, "Lattice Defects in High Quality As-Grown CZ Silicon, Studied with Ligth Scattering and Preferential Etching Techniques", Materials Science Forum, Vols. 196-201, pp. 1755-1760, 1995
Online since
November 1995
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