Paper Title:
Lifetime Identification of Thermal Oxidation Process Induced Contamination in Silicon Wafers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1817-1822
DOI
10.4028/www.scientific.net/MSF.196-201.1817
Citation
H. Daio, K. Yakushiji, A. Buczkowski, F. Shimura, "Lifetime Identification of Thermal Oxidation Process Induced Contamination in Silicon Wafers", Materials Science Forum, Vols. 196-201, pp. 1817-1822, 1995
Online since
November 1995
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Price
$35.00
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