Paper Title:
Transmission Electron Microscopy of LatticeDefects in CZ-Silicon Wafer Formed by Two-Stage Annealing
  Abstract

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Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1823-1828
DOI
10.4028/www.scientific.net/MSF.196-201.1823
Citation
S. Ishikawa, M. Matsushita, J. Shimomura, "Transmission Electron Microscopy of LatticeDefects in CZ-Silicon Wafer Formed by Two-Stage Annealing", Materials Science Forum, Vols. 196-201, pp. 1823-1828, 1995
Online since
November 1995
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$32.00
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