Paper Title:
Study of Near-Surface Microdefects in Czochralski-Si Wafers After a CMOS Thermal Process
  Abstract

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Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1835-1840
DOI
10.4028/www.scientific.net/MSF.196-201.1835
Citation
Y. Kitagawara, K. Aihara, S. Oka, T. Takenaka, "Study of Near-Surface Microdefects in Czochralski-Si Wafers After a CMOS Thermal Process", Materials Science Forum, Vols. 196-201, pp. 1835-1840, 1995
Online since
November 1995
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Price
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