Paper Title:
Precipitates in Antimony Implanted Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1871-1874
DOI
10.4028/www.scientific.net/MSF.196-201.1871
Citation
Y. Kikuchi, F. Uesugi, S. Kaszczyszyn, M. Kase, M. Yoshida, K. Watanabe, I. Hashimoto, "Precipitates in Antimony Implanted Silicon", Materials Science Forum, Vols. 196-201, pp. 1871-1874, 1995
Online since
November 1995
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Price
$32.00
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