Paper Title:
ODMR Investigation of Near-Surface Damage Induced by Dry-Etching Process Using GaAs/AlAs Quantum Well Structures
  Abstract

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Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1927-1932
DOI
10.4028/www.scientific.net/MSF.196-201.1927
Citation
Y. Mochizuki, M. Mizuta, A. Mochizuki, "ODMR Investigation of Near-Surface Damage Induced by Dry-Etching Process Using GaAs/AlAs Quantum Well Structures", Materials Science Forum, Vols. 196-201, pp. 1927-1932, 1995
Online since
November 1995
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Price
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