Paper Title:
Substitutional Gettering of Platinum by Diffusion into Ion-Beam Damaged Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
1985-1990
DOI
10.4028/www.scientific.net/MSF.196-201.1985
Citation
K. B. Nielsen, B. Holm, "Substitutional Gettering of Platinum by Diffusion into Ion-Beam Damaged Silicon", Materials Science Forum, Vols. 196-201, pp. 1985-1990, 1995
Online since
November 1995
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Price
$32.00
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