Paper Title:
Dopant Diffusion in Strained and Relaxed Si1-xGex
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 196-201)
Edited by
M. Suezawa and H. Katayama-Yoshida
Pages
345-348
DOI
10.4028/www.scientific.net/MSF.196-201.345
Citation
A.D.N. Paine, M. Morooka, A. F.W. Willoughby, J. M. Bonar, P. Phillips, M.G. Dowsett, G. Cooke, "Dopant Diffusion in Strained and Relaxed Si1-xGex", Materials Science Forum, Vols. 196-201, pp. 345-348, 1995
Online since
November 1995
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Price
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