Paper Title:
Detailed Modeling of Barrel Chemical Vapor Deposition Reactors
  Abstract

  Info
Periodical
Edited by
A.M. Mancini, C. Paorici and M.L. Terranova
Pages
203-208
DOI
10.4028/www.scientific.net/MSF.203.203
Citation
M. Masi, S. Fogliani, S. Carrà, "Detailed Modeling of Barrel Chemical Vapor Deposition Reactors", Materials Science Forum, Vol. 203, pp. 203-208, 1996
Online since
February 1996
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Price
$32.00
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