Paper Title:
X-Ray Reflectivity and Diffuse Scattering Study of Thermally Treated W1-xSix/Si Multilayers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 228-231)
Edited by
R.J. Cernik, R. Delhez and E.J. Mittemeijer
Pages
505-510
DOI
10.4028/www.scientific.net/MSF.228-231.505
Citation
M. Jergel, E. Majková, V. Holý, R. Senderák, S. Luby, "X-Ray Reflectivity and Diffuse Scattering Study of Thermally Treated W1-xSix/Si Multilayers", Materials Science Forum, Vols. 228-231, pp. 505-510, 1996
Online since
July 1996
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Price
$35.00
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