Generation and Annealing Kinetics of Oxygen Vacancy and Oxygen Excess Centers in Thin Film SiO2 |
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| Journal | Materials Science Forum (Volumes 239 - 241) |
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| Volume | Defects in Insulating Materials |
| Edited by | G.E. Matthews and R.T. Williams |
| Pages | 7-10 |
| DOI | 10.4028/www.scientific.net/MSF.239-241.7 |
| Authors | Mary Ellen Zvanut, T.L. Chen |
| Keywords | Dry Heat-Treatment, Eδ, EX, Impurity, Point Defect, SiO2/Si |
| Full Paper | 
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