Gas Deposition |
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| Journal | Materials Science Forum (Volume 246) |
|---|---|
| Volume | Surface Coatings for Advanced Materials |
| Edited by | R.P. Agarwala |
| Pages | 153-180 |
| DOI | 10.4028/www.scientific.net/MSF.246.153 |
| Citation | C. Hayashi, 1997, Materials Science Forum, 246, 153 |
| Authors | C. Hayashi |
| Keywords | Aerosol, Deposition, Electronic Components, Nanoparticle |
| Full Paper | 
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