Paper Title:
Gas Deposition
  Abstract

  Info
Periodical
Edited by
R.P. Agarwala
Pages
153-180
DOI
10.4028/www.scientific.net/MSF.246.153
Citation
C. Hayashi, "Gas Deposition", Materials Science Forum, Vol. 246, pp. 153-180, 1997
Online since
January 1997
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Price
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