Cluster Ion Beam Processing |
|
| Journal | Materials Science Forum (Volume 246) |
|---|---|
| Volume | Surface Coatings for Advanced Materials |
| Edited by | R.P. Agarwala |
| Pages | 239-260 |
| DOI | 10.4028/www.scientific.net/MSF.246.239 |
| Citation | I. Yamada, 1997, Materials Science Forum, 246, 239 |
| Authors | I. Yamada |
| Keywords | Cluster Ion, Deposition, Implantation, Ion Beam, Sputtering |
| Full Paper | 
Get the full paper by clicking here
|
First page example
