Paper Title:
Cluster Ion Beam Processing
  Abstract

  Info
Periodical
Edited by
R.P. Agarwala
Pages
239-260
DOI
10.4028/www.scientific.net/MSF.246.239
Citation
I. Yamada, "Cluster Ion Beam Processing", Materials Science Forum, Vol. 246, pp. 239-260, 1997
Online since
January 1997
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Price
$32.00
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