Paper Title:
Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 248-249)
Edited by
A.G. Balogh and G. Walter
Pages
233-236
DOI
10.4028/www.scientific.net/MSF.248-249.233
Citation
A. Manuaba, I. Pintér, E. Szilágyi, G. Battistig, C. Ortega, A. Grosman, G. Amsel, "Plasma Immersion Ion Implantation of Nitrogen into Porous Silicon Layers", Materials Science Forum, Vols. 248-249, pp. 233-236, 1997
Online since
May 1997
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Price
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