Paper Title:
Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 248-249)
Edited by
A.G. Balogh and G. Walter
Pages
245-248
DOI
10.4028/www.scientific.net/MSF.248-249.245
Citation
A. Sulyok, A. Galisova, M. Menyhard, "Auger Depth Profiling with Good Depth Resolution of Low Energy Implantation Induced Ion Mixing", Materials Science Forum, Vols. 248-249, pp. 245-248, 1997
Online since
May 1997
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Price
$32.00
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