Paper Title:
Hydrogen and Nitrogen Loss during ERD Analysis of Siliicon (Oxy)nitrides
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 248-249)
Edited by
A.G. Balogh and G. Walter
Pages
381-384
DOI
10.4028/www.scientific.net/MSF.248-249.381
Citation
S.G. Wallace, A.C. Kockelkoren, M.G. Boudreau, P. Mascher, J.S. Forster, J.A. Davies, "Hydrogen and Nitrogen Loss during ERD Analysis of Siliicon (Oxy)nitrides", Materials Science Forum, Vols. 248-249, pp. 381-384, 1997
Online since
May 1997
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Price
$32.00
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