Paper Title:
Highly Focused Ion Beams in Integrated Circuit Testing
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 248-249)
Edited by
A.G. Balogh and G. Walter
Pages
427-432
DOI
10.4028/www.scientific.net/MSF.248-249.427
Citation
K.M. Horn, P.E. Dodd, B.L. Doyle, "Highly Focused Ion Beams in Integrated Circuit Testing", Materials Science Forum, Vols. 248-249, pp. 427-432, 1997
Online since
May 1997
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Price
$32.00
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