Ion Beam Induced Epitaxial Crystallization of Buried SiC Layers in Silicon |
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| Journal | Materials Science Forum (Volumes 248 - 249) |
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| Volume | Materials Science Applications of Ion Beam Techniques |
| Edited by | A.G. Balogh and G. Walter |
| Pages | 73-78 |
| DOI | 10.4028/www.scientific.net/MSF.248-249.73 |
| Authors | J.K.N. Lindner, K. Volz, B. Stritzker |
| Keywords | Amorphization, Buried Layers, Epitaxy, IBIEC, IBIIA, Ion Beam Induced Crystallization, Ion Implantation, Silicon, Silicon Carbide (SiC), Transmission Electron Microscopy (TEM) |
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