Ion Beam Induced Epitaxial Regrowth and Interfacial Amorphization of Compound Semiconductors |
| Journal |
Materials Science Forum (Volumes 248 - 249) |
| Volume |
Materials Science Applications of Ion Beam Techniques |
| Edited by |
A.G. Balogh and G. Walter |
| Pages |
79-86 |
| DOI |
10.4028/www.scientific.net/MSF.248-249.79 |
| Citation |
E. Glaser et al., 1997, Materials Science Forum, 248-249, 79 |
| Authors |
E. Glaser, T. Fehlhaber, Robert Schulz, T. Bachmann |
| Keywords |
Amorphisation, Epitaxial Regrowth, Ion Beam Induced Crystallization, Ion-Implantation |
| Full Paper |
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