Ion Beam Induced Epitaxial Regrowth and Interfacial Amorphization of Compound Semiconductors |
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| Journal | Materials Science Forum (Volumes 248 - 249) |
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| Volume | Materials Science Applications of Ion Beam Techniques |
| Edited by | A.G. Balogh and G. Walter |
| Pages | 79-86 |
| DOI | 10.4028/www.scientific.net/MSF.248-249.79 |
| Authors | E. Glaser, T. Fehlhaber, Robert Schulz, T. Bachmann |
| Keywords | Amorphization, Epitaxial Regrowth, Ion Beam Induced Crystallization, Ion Implantation |
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