Paper Title:
Vacancy-Hydrogen Interaction in Proton-Implanted Si Studied by Positron Lifetime and Infrared Absorption Measurements
  Abstract

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Periodical
Materials Science Forum (Volumes 255-257)
Edited by
Y. C. Jean, Morten Eldrup, David M. Schrader, Roy N. West
Pages
548-550
DOI
10.4028/www.scientific.net/MSF.255-257.548
Citation
A. Kawasuso, H. Arai, S. Okada, "Vacancy-Hydrogen Interaction in Proton-Implanted Si Studied by Positron Lifetime and Infrared Absorption Measurements", Materials Science Forum, Vols. 255-257, pp. 548-550, 1997
Online since
September 1997
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