Paper Title:
Direct Evidence of Fluorine-Related Defects in F+, BF+ and BF2+ Implanted Silicon by Positron Annihilation
  Abstract

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Periodical
Materials Science Forum (Volumes 255-257)
Edited by
Y. C. Jean, Morten Eldrup, David M. Schrader, Roy N. West
Pages
683-685
DOI
10.4028/www.scientific.net/MSF.255-257.683
Citation
L. Liszkay, E. Kótai, Z. Kajcsos, T. Laine, "Direct Evidence of Fluorine-Related Defects in F+, BF+ and BF2+ Implanted Silicon by Positron Annihilation", Materials Science Forum, Vols. 255-257, pp. 683-685, 1997
Online since
September 1997
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