Paper Title:
Electrical Characterization of Defects Introduced During Plasma-Based Processing of GaAs
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 258-263)
Edited by
Gordon Davies and Maria Helena Nazaré
Pages
1045-1050
DOI
10.4028/www.scientific.net/MSF.258-263.1045
Citation
F. D. Auret, S.A. Goodman, G. Myburg, W.E. Meyer, P. N.K. Deenapanray, M. Murtagh, S.-R. Ye, H.J. Masterson, J.T. Beechinor, G.M. Crean, "Electrical Characterization of Defects Introduced During Plasma-Based Processing of GaAs", Materials Science Forum, Vols. 258-263, pp. 1045-1050, 1997
Online since
December 1997
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.