Paper Title:
Electrical Characterization of Electron Beam Induced Defects in Epitaxially Grown Si1-xGex
  Abstract

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Periodical
Materials Science Forum (Volumes 258-263)
Edited by
Gordon Davies and Maria Helena Nazaré
Pages
115-120
DOI
10.4028/www.scientific.net/MSF.258-263.115
Citation
M. Mamor, F. D. Auret, S.A. Goodman, G. Myburg, P. N.K. Deenapanray, W.E. Meyer, "Electrical Characterization of Electron Beam Induced Defects in Epitaxially Grown Si1-xGex", Materials Science Forum, Vols. 258-263, pp. 115-120, 1997
Online since
December 1997
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