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The Influence of Isovalent Doping on Diffusion of Interstitial Oxygen in Silicon

Journal Materials Science Forum (Volumes 258 - 263)
Volume Defects in Semiconductors 19
Edited by Gordon Davies and Maria Helena Nazaré
Pages 1773-1776
DOI 10.4028/www.scientific.net/MSF.258-263.1773
Citation Lyudmila I. Khirunenko et al., 1997, Materials Science Forum, 258-263, 1773
Authors Lyudmila I. Khirunenko, Yu.V. Pomozov, V.I. Shakhovtsov, V.V. Shumov
Keywords Elastic Continuum, Elastic Stresses, Isovalent Impurities, Potential Barrier Height, Silicon
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