Paper Title:
Hydrogenation and Passivation of B in Si by Boiling in Water Pressurized up to 10 ATM
  Abstract

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Periodical
Materials Science Forum (Volumes 258-263)
Edited by
Gordon Davies and Maria Helena Nazaré
Pages
185-190
DOI
10.4028/www.scientific.net/MSF.258-263.185
Citation
Y. Ohmura, M. Libezny, M. Ohtaka, A. Kimoto, M. Yamaura, "Hydrogenation and Passivation of B in Si by Boiling in Water Pressurized up to 10 ATM", Materials Science Forum, Vols. 258-263, pp. 185-190, 1997
Online since
December 1997
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Price
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