Paper Title:
Effects of Hydrogen Plasma on Dislocation Motion in Silicon
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 258-263)
Edited by
Gordon Davies and Maria Helena Nazaré
Pages
313-318
DOI
10.4028/www.scientific.net/MSF.258-263.313
Citation
Y. Yamashita, F. Jyobe, Y. Kamiura, K. Maeda, "Effects of Hydrogen Plasma on Dislocation Motion in Silicon", Materials Science Forum, Vols. 258-263, pp. 313-318, 1997
Online since
December 1997
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Price
$32.00
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