Paper Title:
An Investigation of the Possibility that Oxygen Diffusion in Czochralski Silicon is Catalyzed during Clustering
  Abstract

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Periodical
Materials Science Forum (Volumes 258-263)
Edited by
Gordon Davies and Maria Helena Nazaré
Pages
347-354
DOI
10.4028/www.scientific.net/MSF.258-263.347
Citation
S.A. McQuaid, B.K. Johnson, R. J. Falster, K.F. Kelton, "An Investigation of the Possibility that Oxygen Diffusion in Czochralski Silicon is Catalyzed during Clustering", Materials Science Forum, Vols. 258-263, pp. 347-354, 1997
Online since
December 1997
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