Paper Title:

Shallow Thermal Donors in Annealed CZ Silicon and Links to the NL10 EPR Spectrum: The Relevance of H, Al and N Impurities

Periodical Materials Science Forum (Volumes 258 - 263)
Main Theme Defects in Semiconductors 19
Edited by Gordon Davies and Maria Helena Nazaré
Pages 379-384
DOI 10.4028/www.scientific.net/MSF.258-263.379
Citation R.C. Newman et al., 1997, Materials Science Forum, 258-263, 379
Authors R.C. Newman, M.J. Ashwin, R.E. Pritchard, J.H. Tucker, Edward C. Lightowlers, T. Gregorkiewicz, I.S. Zevenbergen, C.A.J. Ammerlaan, Robert J. Falster, M.J. Binns
Keywords Electron Paramagnetic Resonance (EPR), Infrared Absorption, Oxygen, Shallow Thermal Donors, Silicon
Price US$ 28,-
Article Preview
View full size