Paper Title:
Determination of Stoichiometry and Oxygen Content in Platelike and Octahedral Oxygen Precipitates in Silicon with FT-IR Spectroscopy
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Periodical
Materials Science Forum (Volumes 258-263)
Edited by
Gordon Davies and Maria Helena Nazaré
Pages
405-410
DOI
10.4028/www.scientific.net/MSF.258-263.405
Citation
O. De Gryse, P. Clauws, J. Vanhellemont, C. Claeys, "Determination of Stoichiometry and Oxygen Content in Platelike and Octahedral Oxygen Precipitates in Silicon with FT-IR Spectroscopy", Materials Science Forum, Vols. 258-263, pp. 405-410, 1997
Online since
December 1997
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