Paper Title:
Copper in Silicon: Quantitative Analysis of Internal and Proximity Gettering
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 258-263)
Edited by
Gordon Davies and Maria Helena Nazaré
Pages
461-466
DOI
10.4028/www.scientific.net/MSF.258-263.461
Citation
S. A. McHugo, T. Heiser, H. Hieslmair, C. Flink, E. R. Weber, S.M. Myers, G.A. Petersen, "Copper in Silicon: Quantitative Analysis of Internal and Proximity Gettering", Materials Science Forum, Vols. 258-263, pp. 461-466, 1997
Online since
December 1997
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Price
$32.00
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