Paper Title:
Gas and Heat Treatment Effects on the Defect Structure of a-SiC:H Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 258-263)
Edited by
Gordon Davies and Maria Helena Nazaré
Pages
709-714
DOI
10.4028/www.scientific.net/MSF.258-263.709
Citation
T. Friessnegg, M. Boudreau, P. Mascher, P.J. Simpson, W. Puff, "Gas and Heat Treatment Effects on the Defect Structure of a-SiC:H Films", Materials Science Forum, Vols. 258-263, pp. 709-714, 1997
Online since
December 1997
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Price
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