Paper Title:
6H-SiC MOS Capacitors on Sloped Surfaces: Realisation, Characterisation and Electrical Results
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
1029-1032
DOI
10.4028/www.scientific.net/MSF.264-268.1029
Citation
F. Lanois, D. Planson, P. Lassagne, C. Raynaud, E. Bano, "6H-SiC MOS Capacitors on Sloped Surfaces: Realisation, Characterisation and Electrical Results", Materials Science Forum, Vols. 264-268, pp. 1029-1032, 1998
Online since
February 1998
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Price
$32.00
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