Paper Title:
High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
1101-1106
DOI
10.4028/www.scientific.net/MSF.264-268.1101
Citation
J. von Berg, R. Ziermann, W. Reichert, E. Obermeier, M. Eickhoff, G. Krötz, U. Thoma, T. Boltshauser, C. Cavalloni, J.P. Nendza, "High Temperature Piezoresistive β-SiC-on-SOI Pressure Sensor for Combustion Engines", Materials Science Forum, Vols. 264-268, pp. 1101-1106, 1998
Online since
February 1998
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Price
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