Paper Title:
Impurity Incorporation Mechanism in Step-Controlled Epitaxy Growth Temperature and Substrate Off-Angle Dependence
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
111-114
DOI
10.4028/www.scientific.net/MSF.264-268.111
Citation
T. Yamamoto, T. Kimoto, H. Matsunami, "Impurity Incorporation Mechanism in Step-Controlled Epitaxy Growth Temperature and Substrate Off-Angle Dependence", Materials Science Forum, Vols. 264-268, pp. 111-114, 1998
Online since
February 1998
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