Paper Title:
Growth of High Quality AIN Epitaxial Films by Hot-Wall Chemical Vapour Deposition
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
1133-1136
DOI
10.4028/www.scientific.net/MSF.264-268.1133
Citation
U. Forsberg, J. Birch, M. F. MacMillan, P.O.Å. Persson, L. Hultman, E. Janzén, "Growth of High Quality AIN Epitaxial Films by Hot-Wall Chemical Vapour Deposition", Materials Science Forum, Vols. 264-268, pp. 1133-1136, 1998
Online since
February 1998
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Price
$32.00
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