Paper Title:
Reactive UHV Sputtering and Structural Characterization of Epitaxial AlN/6H-SiC(0001) Thin Films
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
1225-1228
DOI
10.4028/www.scientific.net/MSF.264-268.1225
Citation
S. Tungasmita, J. Birch, L. Hultman, E. Janzén, J.-E. Sundgren, "Reactive UHV Sputtering and Structural Characterization of Epitaxial AlN/6H-SiC(0001) Thin Films", Materials Science Forum, Vols. 264-268, pp. 1225-1228, 1998
Online since
February 1998
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.