Paper Title:
CVD Growth and Characterisation of SiC Epitaxial Layers on Faces Perpendicular to the (0001) Basal Plane
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
123-126
DOI
10.4028/www.scientific.net/MSF.264-268.123
Citation
C. Hallin, A. Ellison, I. G. Ivanov, A. Henry, N. T. Son, E. Janzén, "CVD Growth and Characterisation of SiC Epitaxial Layers on Faces Perpendicular to the (0001) Basal Plane", Materials Science Forum, Vols. 264-268, pp. 123-126, 1998
Online since
February 1998
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