Paper Title:
AlN Deposition by OMVPE and PLD Used as an Encapsulate for Ion Implanted SiC
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 264-268)
Edited by
G. Pensl, H. Morkoç, B. Monemar and E. Janzén
Pages
1243-1246
DOI
10.4028/www.scientific.net/MSF.264-268.1243
Citation
K. A. Jones, K. Xie, D.W. Eckart, M.C. Wood, V. Talyansky, R.D. Vispute, T. Venkatesan, K. Wongchotigul, M. G. Spencer, "AlN Deposition by OMVPE and PLD Used as an Encapsulate for Ion Implanted SiC", Materials Science Forum, Vols. 264-268, pp. 1243-1246, 1998
Online since
February 1998
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